Scanning acoustic microscope with an inverted transducer and bubbler functionality
Abstract:
A scanning acoustic microscope includes a transducer mounted below a particular elevation and configured to produce ultrasonic energy, a coupling fluid source configured to introduce coupling fluid between the transducer and the particular elevation. Ultrasonic energy is directed upwardly through coupling fluid disposed between and the transducer and a first surface of a part to be inspected, wherein the part is disposed at the particular elevation and wherein a second surface of the part is not contacted by coupling fluid during inspection.
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