Invention Grant
- Patent Title: Polymer and positive resist composition
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Application No.: US15549764Application Date: 2016-02-15
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Publication No.: US10241405B2Publication Date: 2019-03-26
- Inventor: Manabu Hoshino
- Applicant: ZEON CORPORATION
- Applicant Address: JP Chiyoda-ku, Tokyo
- Assignee: ZEON CORPORATION
- Current Assignee: ZEON CORPORATION
- Current Assignee Address: JP Chiyoda-ku, Tokyo
- Agency: Kenja IP Law PC
- Priority: JP2015-031730 20150220
- International Application: PCT/JP2016/000770 WO 20160215
- International Announcement: WO2016/132725 WO 20160825
- Main IPC: G03F7/039
- IPC: G03F7/039 ; C08F212/08 ; C08F212/12 ; C08F220/22 ; C09D125/14

Abstract:
Provided are a polymer that can be favorably used as a positive resist having a low film reduction rate under low irradiation, a high γ value, and high sensitivity, and a positive resist composition that can efficiently form a high-resolution pattern. The polymer includes an α-methylstyrene unit and a methyl α-chloroacrylate unit, and has a molecular weight distribution (Mw/Mn) of less than 1.48. In the polymer, the proportion of components having a molecular weight of less than 6,000 is no greater than 0.5% and the proportion of components having a molecular weight of greater than 80,000 is no greater than 6.0%. The positive resist composition contains the aforementioned polymer and a solvent.
Public/Granted literature
- US20180024432A1 POLYMER AND POSITIVE RESIST COMPOSITION Public/Granted day:2018-01-25
Information query
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