Invention Grant
- Patent Title: Resist underlayer film composition, patterning process, and method for forming resist underlayer film
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Application No.: US15915748Application Date: 2018-03-08
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Publication No.: US10241412B2Publication Date: 2019-03-26
- Inventor: Hiroko Nagai , Takeru Watanabe , Daisuke Kori , Tsutomu Ogihara
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2017-71095 20170331
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/09 ; C07C39/14 ; C07C39/15 ; C07C49/83 ; C08F220/28 ; C08F220/32 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; G03F7/38 ; H01L21/266 ; H01L21/308 ; H01L21/311

Abstract:
Provided is a resist underlayer film composition which is excellent in resistance to a basic hydrogen peroxide aqueous solution, in gap-filling and planarization characteristics, and in dry etching characteristic, wherein the resist underlayer film composition is used for a multilayer resist method, comprising: (A1) a polymer (1A) comprising one, or two or more, of a repeating unit represented by following general formula (1); (A2) one, or two or more, of a polyphenol compound having a formula weight of 2,000 or less and not having a 3,4-dihydroxy phenyl group; and (B) an organic solvent.
Public/Granted literature
- US20180284615A1 RESIST UNDERLAYER FILM COMPOSITION, PATTERNING PROCESS, AND METHOD FOR FORMING RESIST UNDERLAYER FILM Public/Granted day:2018-10-04
Information query
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