Invention Grant
- Patent Title: Light source arrangement for a photolithography exposure system and photolithography exposure system
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Application No.: US15650339Application Date: 2017-07-14
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Publication No.: US10241415B2Publication Date: 2019-03-26
- Inventor: Paul Kaiser
- Applicant: SUSS MicroTec Lithography GmbH
- Applicant Address: DE Garching
- Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
- Current Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
- Current Assignee Address: DE Garching
- Agency: Hayes Soloway PC
- Priority: DE202016103819U 20160714
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20 ; G02B26/08 ; H01L21/027

Abstract:
A light source arrangement for a photolithography exposure system comprises at least three light sources with different wavelengths, and a beam splitting unit comprising at least three inputs, one output, and at least two reflecting faces. An input is assigned to each light source and each reflecting face. The reflecting face reflects light that is emitted from the light source assigned to a corresponding input thereof into the output. The three light sources are arranged on three different sides around the beam splitting unit.
Public/Granted literature
- US20180017877A1 Light source arrangement for a photolithography exposure system and photolithography exposure system Public/Granted day:2018-01-18
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