- Patent Title: Low-temperature polycrystalline silicon thin film transistor, and manufacturing method for fabricating the same, array substrate, display panel and display device
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Application No.: US15540112Application Date: 2016-11-01
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Publication No.: US10243004B2Publication Date: 2019-03-26
- Inventor: Shuai Zhang , Yucheng Chan
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Calfee, Halter & Griswold LLP
- Priority: CN201510743470 20151105
- International Application: PCT/CN2016/104224 WO 20161101
- International Announcement: WO2017/076274 WO 20170511
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L21/02 ; H01L29/423 ; H01L29/51 ; H01L29/66 ; H01L29/49

Abstract:
Disclosed are a low-temperature polycrystalline silicon thin film transistor (LTPS TFT), a method for fabricating the same, an array substrate, a display panel, and a display device. The LTPS TFT includes an active layer, a source, a drain, a gate, and a gate insulating layer which are arranged on a substrate. The gate insulating layer is arranged between the active layer and the gate, and a graphene oxide layer which is arranged between the active layer and the gate insulating layer. Since the graphene oxide layer is arranged between the active layer and the gate insulating layer, the interface between the active layer and the gate insulating layer of polycrystalline (P-Si) has a reduced roughness and interfacial defect density, and a pre-cleaning process is not necessary for the gate insulating layer.
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