Invention Grant
- Patent Title: Shared metal gate stack with tunable work function
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Application No.: US15908085Application Date: 2018-02-28
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Publication No.: US10243055B2Publication Date: 2019-03-26
- Inventor: Ruqiang Bao , Siddarth A. Krishnan , Unoh Kwon , Vijay Narayanan
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Jennifer Davis
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L21/306 ; H01L29/78 ; H01L29/66 ; H01L21/8238 ; H01L21/84 ; H01L27/092 ; H01L27/12

Abstract:
Semiconductor devices include at least one semiconductor fin in each of a first region and a second region. A first work function stack that includes a bottom layer, a middle layer, and a top layer is formed over the at least one semiconductor fin in the first region. A second work function stack that includes a first layer and a second layer is formed over the at least one semiconductor fin in the second region. The first layer is continuous with the bottom layer of the first work function stack and the second layer is continuous with the middle layer of the first work function stack but has a smaller thickness than the middle layer. A continuous gate is formed over the first and the second work function stack.
Public/Granted literature
- US20180190784A1 SHARED METAL GATE STACK WITH TUNABLE WORK FUNCTION Public/Granted day:2018-07-05
Information query
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