Invention Grant
- Patent Title: Micromechanical component and production method for a micromechanical component
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Application No.: US15702034Application Date: 2017-09-12
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Publication No.: US10246318B2Publication Date: 2019-04-02
- Inventor: Helmut Grutzeck , Jochen Reinmuth
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102016217371 20160913
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H04R19/00 ; H04R19/04 ; H02N1/00 ; G01L9/00

Abstract:
A micromechanical component having a substrate, a membrane that covers an opening structured into the substrate from a first side of the substrate and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate, and having at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode can be displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate. A production method for a micromechanical component is also described.
Public/Granted literature
- US20180072560A1 MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT Public/Granted day:2018-03-15
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