A process for purifying an acryloyloxysilane comprising subjecting a mixture comprising an acryloyloxysilane, a haloorganoalkoxysilane, and an alkane-based non-polar solvent to a temperature and pressure sufficient to vaporize a portion of the non-polar solvent, the haloorganoalkoxysilane, or the non-polar solvent and the haloorganoalkoxysilane from the mixture to produce a purified mixture comprising the acryloyloxysilane. The examples disclose a three-step short-path distillation process, where in the first two passes, the residue-fraction is the one containing the product, whereas in the third path, the distillate is containing the purified product.