Invention Grant
- Patent Title: DNA sequencing detection field effect transistor
-
Application No.: US15958669Application Date: 2018-04-20
-
Publication No.: US10246745B2Publication Date: 2019-04-02
- Inventor: Sanghoon Lee , Effendi Leobandung , Renee T. Mo
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: C12Q1/68
- IPC: C12Q1/68 ; C12Q1/6869 ; G01N27/414

Abstract:
A semiconductor structure is provided that can be used for DNA sequencing detection. The semiconductor structure includes a doped epitaxial source semiconductor material structure located on a first portion of a semiconductor substrate and a doped epitaxial drain semiconductor material structure located on a second portion of the semiconductor substrate. A gate dielectric portion is located on a third portion of the semiconductor substrate and positioned between the doped epitaxial source semiconductor material structure and the doped epitaxial drain semiconductor material structure. A non-stick nucleotide, DNA and DNA polymerase material structure is located atop the doped epitaxial source semiconductor material structure and atop the doped epitaxial drain semiconductor material structure, wherein a cavity is present in the non-stick nucleotide, DNA and DNA polymerase material structure that exposes a topmost surface of the gate dielectric portion.
Public/Granted literature
- US20180237848A1 DNA SEQUENCING DETECTION FIELD EFFECT TRANSISTOR Public/Granted day:2018-08-23
Information query