Invention Grant
- Patent Title: Method for removing a metal deposit placed on a surface in a chamber
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Application No.: US15328413Application Date: 2015-07-24
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Publication No.: US10246781B2Publication Date: 2019-04-02
- Inventor: Julien Vitiello , Jean-Luc Delcarri , Fabien Piallat
- Applicant: KOBUS
- Agency: Burr & Forman LLP
- Agent Harvey S. Kauget
- Priority: FR1457137 20140724
- International Application: PCT/EP2015/067044 WO 20150724
- International Announcement: WO2016/012610 WO 20160128
- Main IPC: C23F1/00
- IPC: C23F1/00 ; C07C49/167 ; C07C45/00 ; C23C14/56 ; C23C16/44 ; C23G5/00 ; H01J37/32
Abstract:
A method for removing a metallic deposit disposed on a surface in a chamber, including the following steps: a) a step of oxidizing the metallic deposit; b) a step of injecting chemical species adapted to volatilized the oxidized metallic deposit, the step b) being implemented during at least a part of step a); and in step b), the chemical species are injected according to a sequence of pulses.
Public/Granted literature
- US20170204522A1 METHOD FOR REMOVING A METAL DEPOSIT PLACED ON A SURFACE IN A CHAMBER Public/Granted day:2017-07-20
Information query
