Invention Grant
- Patent Title: Copper etchant solution additives and method for producing copper etchant solution
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Application No.: US15123645Application Date: 2016-07-11
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Publication No.: US10246783B2Publication Date: 2019-04-02
- Inventor: Yue Wu , Yu-lien Chou , Zhichao Zhou
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- International Application: PCT/CN2016/089681 WO 20160711
- International Announcement: WO2017/219395 WO 20171228
- Main IPC: C23F1/18
- IPC: C23F1/18

Abstract:
The present disclosure discloses a copper etchant solution additives and a method for producing copper etchant solution. The method includes: producing copper etchant solution additives, wherein the copper etchant solution additives is an inorganic solution with cupric ions (Cu2+), and deionized water is a solvent for the copper etchant solution additives and is electric neutrality; before wet-etching, the copper etchant solution additives is added in the copper etchant solution, and the copper etchant solution is with a cupric ions (Cu2+) concentration of 700-1000 ppm. Through the above method, the present disclosure can improve etchant property of copper etchant solution to increase etching rate and uniformity.
Public/Granted literature
- US20180171485A1 Copper etchant solution additives and method for producing copper etchant solution Public/Granted day:2018-06-21
Information query
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