Invention Grant
- Patent Title: Mirror, more particularly for a microlithographic projection exposure apparatus
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Application No.: US15789125Application Date: 2017-10-20
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Publication No.: US10247862B2Publication Date: 2019-04-02
- Inventor: Anastasia Gonchar
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS SMT GMBH
- Current Assignee: CARL ZEISS SMT GMBH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102015207140 20150420
- Main IPC: G02B5/08
- IPC: G02B5/08 ; G03F7/20 ; G02B1/14 ; G02B27/00 ; G03F1/24 ; G21K1/06

Abstract:
A mirror, in particular for a microlithographic projection exposure apparatus, has a mirror substrate (101), a reflection layer system (102) configured to reflect electromagnetic radiation that is incident on the optically effective surface (100a), and a capping layer (104), which is arranged on the side of the reflection layer system (102) facing the optically effective surface. The capping layer is produced from a first material. Particles (105) of a second material, either individually or in clusters, are applied onto this capping layer, wherein the second material differs from the first material.
Public/Granted literature
- US20180039001A1 MIRROR, MORE PARTICULARLY FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2018-02-08
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