Invention Grant
- Patent Title: Imprint apparatus and method of manufacturing article
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Application No.: US14673141Application Date: 2015-03-30
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Publication No.: US10248018B2Publication Date: 2019-04-02
- Inventor: Philip D. Schumaker , Xiaoming Lu , Wei Zhang , Atsushi Kimura , Jun Ota
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
The present invention provides an imprint apparatus which molds an imprint material on a shot region formed on a substrate by using a mold including a pattern surface on which a pattern is formed, comprising a holding unit configured to change a position and orientation of the mold, and a control unit configured to cause the holding unit to incline the mold, and bring the mold and the imprint material into contact with each other while the mold is inclined, wherein after the control unit obtains a shift amount by which a mark on the mold shifts by inclining the mold, and changes relative positions of the mold and the substrate according to the shift amount, the control unit brings the mold and the imprint material into contact with each other.
Public/Granted literature
- US20160288403A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2016-10-06
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