Invention Grant
- Patent Title: Source optimization for image fidelity and throughput
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Application No.: US15135339Application Date: 2016-04-21
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Publication No.: US10248028B2Publication Date: 2019-04-02
- Inventor: Yuri Granik
- Applicant: Mentor Graphics Corporation
- Applicant Address: US OR Wilsonville
- Assignee: Mentor Graphics Corporation
- Current Assignee: Mentor Graphics Corporation
- Current Assignee Address: US OR Wilsonville
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A system and method for optimizing an illumination source to print a desired pattern of features dividing a light source into pixels and determining an optimum intensity for each pixel such that when the pixels are simultaneously illuminated, the error in a printed pattern of features is minimized. In one embodiment, pixel solutions are constrained from solutions that are bright, continuous, and smooth. In another embodiment, the light source optimization and resolution enhancement technique(s) are iteratively performed to minimize errors in a printed pattern of features.
Public/Granted literature
- US20160238950A1 SOURCE OPTIMIZATION FOR IMAGE FIDELITY AND THROUGHPUT Public/Granted day:2016-08-18
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