- Patent Title: Piezoelectric driving device, robot, and driving method of the same
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Application No.: US15497711Application Date: 2017-04-26
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Publication No.: US10249811B2Publication Date: 2019-04-02
- Inventor: Tomohisa Iwazaki , Akio Konishi , Kiichi Kajino , Koichi Kamijo , Osamu Miyazawa , Yutaka Arakawa , Daisuke Yamada
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-164631 20140813
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H01L41/047 ; B25J9/12 ; H01L41/09 ; H02N2/00 ; H02N2/10 ; B25J17/00 ; H02P25/16 ; H02P25/032 ; H02P25/32 ; H02N2/14

Abstract:
A piezoelectric driving device includes a vibrating plate, and a piezoelectric vibrating body including a substrate, and piezoelectric elements provided on the substrate. The piezoelectric element includes a first electrode, a second electrode, and a piezoelectric body, and the first electrode, the piezoelectric body, and the second electrode are laminated in this order on the substrate. The piezoelectric vibrating body is installed on the vibrating plate so that the piezoelectric element is interposed between the substrate and the vibrating plate. A wiring pattern including a first wiring corresponding to the first electrode and a second wiring corresponding to the second electrode is formed on the vibrating plate, the first electrode and the first wiring are connected to each other through a first laminated conducting portion, and the second electrode and the second wiring are connected to each other through a second laminated conducting portion.
Public/Granted literature
- US20170229634A1 PIEZOELECTRIC DRIVING DEVICE, ROBOT, AND DRIVING METHOD OF THE SAME Public/Granted day:2017-08-10
Information query
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