Invention Grant
- Patent Title: Method for impedance matching of plasma processing apparatus
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Application No.: US15790170Application Date: 2017-10-23
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Publication No.: US10250217B2Publication Date: 2019-04-02
- Inventor: Koichi Nagami , Norikazu Yamada
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2016-209701 20161026
- Main IPC: H03H7/38
- IPC: H03H7/38 ; H03H7/40

Abstract:
Each of a first high frequency power supply and a second high frequency power supply of a plasma processing apparatus is configured to selectively output a continuous wave, a modulated wave and a double-modulated wave. A first average value which determines an impedance at a load side of the first high frequency power supply and a second average value which determines an impedance at a load side of the second high frequency power supply are obtained by using any one of two averaging methods depending on a first high frequency power output from the first high frequency power supply and a second high frequency power output from the second high frequency power supply. An impedance matching of each of a first matching device and a second matching device is performed based on the first average value and the second average value.
Public/Granted literature
- US20180115299A1 METHOD FOR IMPEDANCE MATCHING OF PLASMA PROCESSING APPARATUS Public/Granted day:2018-04-26
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