Invention Grant
- Patent Title: Piezoelectric thin film resonator and filter
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Application No.: US15357644Application Date: 2016-11-21
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Publication No.: US10250218B2Publication Date: 2019-04-02
- Inventor: Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Tokihiro Nishihara
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2015-240563 20151209
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/17 ; H03H9/54 ; H03H9/58 ; H03H9/60

Abstract:
A piezoelectric thin film resonator includes: a substrate; a lower electrode and an upper electrode located on the substrate; a piezoelectric film, at least a part of the piezoelectric film being sandwiched between the upper electrode and the lower electrode, the piezoelectric film including a discontinuous portion in which the piezoelectric film discontinues in at least a part of a region surrounding a center region that includes a center of a resonance region where the upper electrode and the lower electrode face each other across the at least a part of the piezoelectric film.
Public/Granted literature
- US20170170807A1 PIEZOELECTRIC THIN FILM RESONATOR AND FILTER Public/Granted day:2017-06-15
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