Invention Grant
- Patent Title: Elastic wave device, electronic component, and method for manufacturing elastic wave device
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Application No.: US15014239Application Date: 2016-02-03
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Publication No.: US10250220B2Publication Date: 2019-04-02
- Inventor: Yuji Miwa , Hijiri Sumii , Junpei Yasuda , Taku Kikuchi , Hisashi Yamazaki
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2013-168676 20130814
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H03H9/02 ; H03H3/08 ; H03H9/05 ; H03H9/10

Abstract:
An elastic wave device includes a piezoelectric substrate, an IDT electrode, wiring, a pad, an under bump metal, a first dielectric layer, and a second dielectric layer. At least a portion of the IDT electrode includes a first electrically conductive film, at least a portion of the wiring includes a multilayer body including the first electrically conductive film and a second electrically conductive film, and at least a portion of the pad includes the second electrically conductive film. The second dielectric layer covers the region other than the contact region between the second electrically conductive film and the under bump metal. Consequently, the second electrically conductive film is covered with the second dielectric layer and the under bump metal and is not exposed to air.
Public/Granted literature
- US20160156331A1 ELASTIC WAVE DEVICE, ELECTRONIC COMPONENT, AND METHOD FOR MANUFACTURING ELASTIC WAVE DEVICE Public/Granted day:2016-06-02
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