Invention Grant
- Patent Title: Acoustic wave device
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Application No.: US15451684Application Date: 2017-03-07
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Publication No.: US10250223B2Publication Date: 2019-04-02
- Inventor: Tomoyuki Kurihara , Kazushige Hatakeyama , Takuma Kuroyanagi , Yohei Shimizu , Masahiro Sato , Naoki Kakita , Kazutaka Suzuki
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2016-054430 20160317
- Main IPC: H03H9/10
- IPC: H03H9/10 ; H03H9/02 ; H03H3/08 ; H03H9/05 ; H03H9/64

Abstract:
An acoustic wave device includes: a first substrate including a support substrate and a piezoelectric substrate bonded on an upper surface of the support substrate, and including a first acoustic wave element located on an upper surface of the piezoelectric substrate; a ring-shaped metal layer located in a region that surrounds the first acoustic wave element and in which the piezoelectric substrate is removed, a second substrate flip-chip mounted on an upper surface of the first substrate and including a functional element located on a lower surface of the second substrate; and a metallic member located on an upper surface of the ring-shaped metal layer, surrounding the second substrate in plan view, not located between the first substrate and the second substrate, and sealing the first acoustic wave element and the functional element so that the first acoustic wave element and the functional element are located across an air gap.
Public/Granted literature
- US20170272051A1 ACOUSTIC WAVE DEVICE Public/Granted day:2017-09-21
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