• Patent Title: Package structure of MEMS microphone
  • Application No.: US15554980
    Application Date: 2015-12-10
  • Publication No.: US10250962B2
    Publication Date: 2019-04-02
  • Inventor: Guoguang Zheng
  • Applicant: GOERTEK.INC
  • Applicant Address: CN Weifang, Shandong
  • Assignee: GOERTEK.INC
  • Current Assignee: GOERTEK.INC
  • Current Assignee Address: CN Weifang, Shandong
  • Agency: Ladas & Parry LLP
  • Agent Loren K. Thompson
  • Priority: CN201510227109 20150506
  • International Application: PCT/CN2015/096912 WO 20151210
  • International Announcement: WO2016/176993 WO 20161110
  • Main IPC: H04R1/04
  • IPC: H04R1/04 H04R19/00 H04R19/04 H04R31/00
Package structure of MEMS microphone
Abstract:
The present invention discloses a package structure of a MEMS microphone. The package structure comprises a closed inner cavity formed by a package shell in a surrounding manner, as well as a MEMS chip and an ASIC chip which are located in the closed inner cavity, wherein a sound hole allowing sound to flow into the closed inner cavity is formed in the package shell; the MEMS chip comprises a substrate as well as a vibrating diaphragm and a back plate which are provided on the substrate; the vibrating diaphragm divides the closed inner cavity into a front cavity and a back cavity; and a sound-absorbing structure is provided in the back cavity.
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