Invention Grant
- Patent Title: Package structure of MEMS microphone
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Application No.: US15554980Application Date: 2015-12-10
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Publication No.: US10250962B2Publication Date: 2019-04-02
- Inventor: Guoguang Zheng
- Applicant: GOERTEK.INC
- Applicant Address: CN Weifang, Shandong
- Assignee: GOERTEK.INC
- Current Assignee: GOERTEK.INC
- Current Assignee Address: CN Weifang, Shandong
- Agency: Ladas & Parry LLP
- Agent Loren K. Thompson
- Priority: CN201510227109 20150506
- International Application: PCT/CN2015/096912 WO 20151210
- International Announcement: WO2016/176993 WO 20161110
- Main IPC: H04R1/04
- IPC: H04R1/04 ; H04R19/00 ; H04R19/04 ; H04R31/00

Abstract:
The present invention discloses a package structure of a MEMS microphone. The package structure comprises a closed inner cavity formed by a package shell in a surrounding manner, as well as a MEMS chip and an ASIC chip which are located in the closed inner cavity, wherein a sound hole allowing sound to flow into the closed inner cavity is formed in the package shell; the MEMS chip comprises a substrate as well as a vibrating diaphragm and a back plate which are provided on the substrate; the vibrating diaphragm divides the closed inner cavity into a front cavity and a back cavity; and a sound-absorbing structure is provided in the back cavity.
Public/Granted literature
- US20180048951A1 PACKAGE STRUCTURE OF MEMS MICROPHONE Public/Granted day:2018-02-15
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