- Patent Title: Polishing pads and systems and methods of making and using the same
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Application No.: US15129639Application Date: 2015-03-31
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Publication No.: US10252396B2Publication Date: 2019-04-09
- Inventor: Duy K. Lehuu , Kenneth A. P. Meyer , Moses M. David
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- Agent Adam Bramwell; Jeffrey S. Kollodge
- International Application: PCT/US2015/023576 WO 20150331
- International Announcement: WO2015/153601 WO 20151008
- Main IPC: B24B7/22
- IPC: B24B7/22 ; B24B37/22 ; B24B37/26 ; B24B37/24 ; B24B7/24

Abstract:
The present disclosure relates to polishing pads which include a polishing layer, wherein the polishing layer includes a working surface and a second surface opposite the working surface. The working surface includes at least one of a plurality of precisely shaped pores and a plurality of precisely shaped asperities. The present disclosure further relates to a polishing system, the polishing system includes the preceding polishing pad and a polishing solution. The present disclosure relates to a method of polishing a substrate, the method of polishing including: providing a polishing pad according to any one of the previous polishing pads; providing a substrate, contacting the working surface of the polishing pad with the substrate surface, moving the polishing pad and the substrate relative to one another while maintaining contact between the working surface of the polishing pad and the substrate surface, wherein polishing is conducted in the presence of a polishing solution.
Public/Granted literature
- US20170173758A1 POLISHING PADS AND SYSTEMS AND METHODS OF MAKING AND USING THE SAME Public/Granted day:2017-06-22
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