Compact instrument with exchangeable modules for multiple microfabrication and/or nanofabrication methods
Abstract:
A device used as an instrument for microfabrication and/or nanofabrication featuring exchangeable module heads and multi-axis positioning of components. For example, a single module head can be adapted for carrying out photolithography, microcontact printing, and/or nanoimprint lithography. Another module head can be adapted to carry out different methods. The versatile device is used for training and is compact and relatively inexpensive. A working example for microcontact printing is provided.
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