Invention Grant
- Patent Title: Compact instrument with exchangeable modules for multiple microfabrication and/or nanofabrication methods
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Application No.: US14805970Application Date: 2015-07-22
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Publication No.: US10252463B2Publication Date: 2019-04-09
- Inventor: Nabil A. Amro , Sandeep Disawal
- Applicant: Nabil A. Amro , Sandeep Disawal
- Agency: The Marbury Law Group, PLLC
- Main IPC: B29C59/02
- IPC: B29C59/02 ; B29C67/00 ; B29C64/00 ; G03F7/00 ; G03F7/20 ; B33Y30/00

Abstract:
A device used as an instrument for microfabrication and/or nanofabrication featuring exchangeable module heads and multi-axis positioning of components. For example, a single module head can be adapted for carrying out photolithography, microcontact printing, and/or nanoimprint lithography. Another module head can be adapted to carry out different methods. The versatile device is used for training and is compact and relatively inexpensive. A working example for microcontact printing is provided.
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