Invention Grant
- Patent Title: Arc deposition source having a defined electric field
-
Application No.: US13805730Application Date: 2011-06-03
-
Publication No.: US10253407B2Publication Date: 2019-04-09
- Inventor: Siegfried Krassnitzer , Juerg Hagmann
- Applicant: Siegfried Krassnitzer , Juerg Hagmann
- Applicant Address: CH Pfäffikon SZ
- Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee Address: CH Pfäffikon SZ
- Agency: Pearne & Gordon LLP
- International Application: PCT/EP2011/002734 WO 20110603
- International Announcement: WO2011/160766 WO 20111229
- Main IPC: C23C14/35
- IPC: C23C14/35 ; C23C14/00 ; C23C14/02 ; C23C14/32 ; C23C14/58 ; H01J37/32

Abstract:
The invention relates to an arc deposition device, comprising a cathode, an anode, as well as a voltage source for putting the anode at positive potential relative to the cathode. The device also comprises magnetic elements, which cause a magnetic field over the cathode surface, wherein the anode is arranged in the vicinity of the cathode in such a way that the magnetic field lines exiting from the cathode surface hit the anode.
Public/Granted literature
- US20130126347A1 ARC DEPOSITION SOURCE HAVING A DEFINED ELECTRIC FIELD Public/Granted day:2013-05-23
Information query
IPC分类: