Invention Grant
- Patent Title: Local carbon-supply device and method for preparing wafer-level graphene single crystal by local carbon supply
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Application No.: US15111268Application Date: 2015-06-04
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Publication No.: US10253428B2Publication Date: 2019-04-09
- Inventor: Tianru Wu , Xuefu Zhang , Guangyuan Lu , Chao Yang , Haomin Wang , Xiaoming Xie , Mianheng Jiang
- Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Current Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Shanghai
- Agency: Oliff PLC
- Priority: CN201510189745 20150420
- International Application: PCT/CN2015/080738 WO 20150604
- International Announcement: WO2016/169108 WO 20161027
- Main IPC: C30B25/00
- IPC: C30B25/00 ; C30B25/18 ; C23C16/26 ; C30B29/02 ; C23C14/16 ; C23C14/35 ; C23C14/58 ; C23C16/02 ; C23C16/455 ; C23F17/00 ; C25D5/50 ; C25F3/22 ; C30B25/12 ; C30B25/16 ; C25D5/34 ; C25D7/06 ; C01B32/186 ; C22F1/08 ; C25D3/12

Abstract:
The present disclosure provides a local carbon-supply device and a method for preparing a wafer-level graphene single crystal by local carbon supply. The method includes: providing the local carbon-supply device; preparing a nickel-copper alloy substrate, placing the nickel-copper alloy substrate in the local carbon-supply device; placing the local carbon-supply device provided with the nickel-copper alloy substrate in a chamber of a chemical vapor-phase deposition system, and introducing a gaseous carbon source into the local carbon-supply device to grow the graphene single crystal on the nickel-copper alloy substrate. A graphene prepared by embodiments of the present disclosure has the advantages of good crystallinity of a crystal domain, simple preparation condition, low cost, a wider window of condition parameters required for growth, and good repeatability, which lays a foundation for wide application of the wafer-level graphene single crystal in a graphene apparatus and other fields.
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