- Patent Title: Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism
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Application No.: US15021499Application Date: 2014-09-01
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Publication No.: US10253777B2Publication Date: 2019-04-09
- Inventor: Yoshiyuki Sakaguchi , Akihiko Wada , Takashi Kabasawa
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JP2013-205599 20130930; JP2014-016476 20140131
- International Application: PCT/JP2014/072913 WO 20140901
- International Announcement: WO2015/045748 WO 20150402
- Main IPC: F04D19/04
- IPC: F04D19/04

Abstract:
The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.
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