Invention Grant
- Patent Title: Method and optical sensor for determining at least one coordinate of at least one measurement object
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Application No.: US15844616Application Date: 2017-12-17
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Publication No.: US10254106B2Publication Date: 2019-04-09
- Inventor: Frank Hoeller , Christian Hembd
- Applicant: Carl Zeiss Industrielle Messtechnik GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Ewers & Hasselmann PLLC
- Priority: DE102016225484 20161219
- Main IPC: G01B11/00
- IPC: G01B11/00

Abstract:
An optical sensor for determining a coordinate of a measurement object is provided which includes a stop element and an illumination apparatus configured to generate an illumination light beam and to illuminate the measurement object through the stop element, a sensor element configured to detect a portion of a detection light beam emanating from the measurement object and to determine an intensity distribution, and an optical element configured to focus a portion of the illumination light beam at one focal point along an optical axis. The optical sensor includes an apparatus configured to vary and set a relative lateral position of the optical axis to the measurement object to determine, for each of first and second focal points, first and second intensity distributions at first and second relative lateral positions and to determine therefrom a distance coordinate and/or a lateral coordinate of the measurement object.
Public/Granted literature
- US20180172427A1 METHOD AND OPTICAL SENSOR FOR DETERMINING AT LEAST ONE COORDINATE OF AT LEAST ONE MEASUREMENT OBJECT Public/Granted day:2018-06-21
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