Invention Grant
- Patent Title: Method of generating quality affecting factor for semiconductor manufacturing process and generating system for the same
-
Application No.: US14955633Application Date: 2015-12-01
-
Publication No.: US10254333B2Publication Date: 2019-04-09
- Inventor: SeungLi Kim , Bokyoung Kang , Ji-Youn Kwon , Gilhan Kim , Chanhun Park , Byonghun Cho , SeHoon Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2015-0006907 20150114
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/28 ; G06Q30/02 ; G06Q50/04

Abstract:
A quality affecting factor generation method for a semiconductor manufacturing process is provided. The method includes receiving data of a customer evaluation result obtained by a real use of shipped semiconductor products, preprocessing the data of the customer evaluation result, determining critical quality factors that affect a quality of the semiconductor products by applying a statistical model to the preprocessed data of the customer evaluation result; and determining a semiconductor product to be shipped to a customer company as a good product and a failed product using the determined critical quality factors and generating quality affecting factors of the semiconductor products to be managed to improve yield in a semiconductor manufacturing process.
Public/Granted literature
Information query