Invention Grant
- Patent Title: Inspection apparatus and inspection system
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Application No.: US14483705Application Date: 2014-09-11
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Publication No.: US10254397B2Publication Date: 2019-04-09
- Inventor: Hiroyuki Kayano , Toshiro Hiraoka
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-198534 20130925; JP2014-165937 20140818
- Main IPC: G01V8/00
- IPC: G01V8/00 ; H01Q1/36 ; H01Q1/38 ; G01S13/04 ; G01S13/88 ; G01S13/89 ; H01Q21/06

Abstract:
An inspection apparatus of an embodiment includes a transmitting antenna device connected to a transmitting unit including a transmitting device configured to transmit a microwave, and a receiving antenna device connected to a receiving unit including a receiving device. Each of the transmitting antenna device and the receiving antenna device faces a subject to be inspected. The receiving antenna device receives at least one of a microwave transmitted from the transmitting antenna device and penetrating the subject to be inspected, a microwave of which phase has been delayed, and a microwave diffracted in the subject to be inspected. The receiving unit is a directional antenna.
Public/Granted literature
- US20150084645A1 INSPECTION APPARATUS AND INSPECTION SYSTEM Public/Granted day:2015-03-26
Information query