Invention Grant
- Patent Title: Semiconductor optical modulation element
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Application No.: US15577918Application Date: 2016-06-01
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Publication No.: US10254624B2Publication Date: 2019-04-09
- Inventor: Yoshihiro Ogiso , Josuke Ozaki , Norihide Kashio , Nobuhiro Kikuchi , Masaki Kohtoku
- Applicant: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- Current Assignee: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2015-112448 20150602
- International Application: PCT/JP2016/002649 WO 20160601
- International Announcement: WO2016/194369 WO 20161208
- Main IPC: G02F1/035
- IPC: G02F1/035 ; G02F1/225 ; G02F1/025 ; G02F1/21

Abstract:
To provide a Mach-Zehnder (MZ) type semiconductor optical modulation element that can be used as a modulator, which is ultrafast and excellent in electrical stability. A semiconductor optical modulation element of a Mach-Zehnder type that performs modulation of light using a refractive index modulation region where a refractive index of the light guided to an optical waveguide is modulated and an input and output region where multiplexing/demultiplexing of the light split in the refractive index modulation region is performed, characterized in that in the refractive index modulation region of the optical waveguide, an n-type clad layer, an i core layer, and a p-type clad layer are stacked in the order from a top layer on a substrate surface equivalent to a (100) plane of a sphalerite-type seminsulating semiconductor crystal substrate, the n-type clad layer is formed in a ridge shape in an inverted mesa direction, and a capacitancl-oaded electrode is provided on the n-type clad layer.
Public/Granted literature
- US20180164654A1 SEMICONDUCTOR OPTICAL MODULATION ELEMENT Public/Granted day:2018-06-14
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