Invention Grant
- Patent Title: Microelectromechanical mirror assembly
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Application No.: US15844086Application Date: 2017-12-15
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Publication No.: US10254654B2Publication Date: 2019-04-09
- Inventor: Shane R. Palmer , Michael Binnard
- Applicant: NIKON CORPORATION
- Applicant Address: JP
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP
- Agency: Roeder & Broder LLP
- Agent Steven G. Roeder
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/06 ; G02B26/08 ; G02B26/10

Abstract:
An optical element assembly includes a base, and an element unit. The element unit includes (i) an optical element having an element central axis and an element perimeter; and (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a flexure assembly having an element flexure and a base flexure. A distal end of the element flexure is coupled to the optical element near the element perimeter, a distal end of the base flexure is coupled to the base, and a proximal end of the element flexure is coupled to a proximal end of the base flexure near the element central axis.
Public/Granted literature
- US20180107121A1 MICROELECTROMECHANICAL MIRROR ASSEMBLY Public/Granted day:2018-04-19
Information query
IPC分类: