Invention Grant
- Patent Title: Device for aligning a component
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Application No.: US16002096Application Date: 2018-06-07
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Publication No.: US10254664B2Publication Date: 2019-04-09
- Inventor: Michael Erath
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102015225537 20151217
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H02N15/00

Abstract:
The disclosure provides a device for aligning a component via a guide member. A head region of the guide member is secured at a fixing point of the component, and a foot region of the guide member is secured at a fixing point of an actuating element of an actuating facility. The actuating facility is configured to hold the guide member moveably in a movement axis for the purpose of transmitting a force to the component. An adjusting facility is provided to adjust the fixing point of the actuating element so that an angle between the movement axis and the course of the guide member between the fixing points is variable.
Public/Granted literature
- US20180284626A1 DEVICE FOR ALIGNING A COMPONENT Public/Granted day:2018-10-04
Information query
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