Invention Grant
- Patent Title: Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member
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Application No.: US14740805Application Date: 2015-06-16
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Publication No.: US10254693B2Publication Date: 2019-04-09
- Inventor: Hiroyuki Yokohara , Shinji Orimoto , Hiroshi Sone , Naoyuki Suzuki
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Priority: JP2014-126558 20140619
- Main IPC: G03G15/20
- IPC: G03G15/20 ; H01J37/34 ; C23C14/34

Abstract:
A fixing unit fixes a plate-shaped member to a fixing base member. The fixing unit includes: a pressing unit configured to press the plate-shaped member toward the fixing base member; and a plurality of positioning units, installed at the fixing base member to be in contact with side surfaces of the plate-shaped member, and configured to place the plate-shaped member with respect to the fixing base member. Each of the positioning units includes: a shaft to be installed at the fixing base member; and a slide part movable along the shaft, and the slide part includes a contact part to be in contact with one of the side surfaces of the plate-shaped member and a clearance part formed on the contact part to have a smaller width than that of the contact part.
Public/Granted literature
- US20150370204A1 FIXING UNIT OF PLATE-SHAPED MEMBER, PVD PROCESSING APPARATUS AND FIXING METHOD OF PLATE-SHAPED MEMBER Public/Granted day:2015-12-24
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