Invention Grant
- Patent Title: Intelligent environmental and security monitoring system
-
Application No.: US15835327Application Date: 2017-12-07
-
Publication No.: US10255785B1Publication Date: 2019-04-09
- Inventor: Chun-Jung Huang , Kuang-Huan Hsu , Yung-Lin Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G08B21/18 ; H01L21/677 ; G01N27/414 ; H04W4/38 ; G05D1/02

Abstract:
Disclosed is a method and a system for monitoring of environment and security in a fabrication facility. In one embodiment, a method comprising: transporting an automated material handling system (AMHS) vehicle from a first position to a second position; and detecting at least one parameter using at least one sensor located on the AMHS vehicle to determine at least one environmental or security condition between the first and second positions.
Information query
IPC分类: