Invention Grant
- Patent Title: Sub-pulsing during a state
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Application No.: US16000348Application Date: 2018-06-05
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Publication No.: US10256077B2Publication Date: 2019-04-09
- Inventor: John C. Valcore, Jr. , Harmeet Singh , Bradford J. Lyndaker
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03L7/00 ; H03K3/01 ; H03L7/06 ; H05H1/46

Abstract:
A method for achieving sub-pulsing during a state is described. The method includes receiving a clock signal from a clock source, the clock signal having two states and generating a pulsed signal from the clock signal. The pulsed signal has sub-states within one of the states. The sub-states alternate with respect to each other at a frequency greater than a frequency of the states. The method includes providing the pulsed signal to control power of a radio frequency (RF) signal that is generated by an RF generator. The power is controlled to be synchronous with the pulsed signal.
Public/Granted literature
- US20180294140A1 Sub-Pulsing During a State Public/Granted day:2018-10-11
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