Invention Grant
- Patent Title: Apparatus for the plasma treatment of surfaces and a method for treating surfaces with plasma
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Application No.: US14920955Application Date: 2015-10-23
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Publication No.: US10256080B2Publication Date: 2019-04-09
- Inventor: Marcel Hähnel
- Applicant: tesa SE
- Applicant Address: DE Norderstedt
- Assignee: TESA SE
- Current Assignee: TESA SE
- Current Assignee Address: DE Norderstedt
- Agency: Norris McLaughlin, P.A.
- Priority: DE102014221521 20141023
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/24 ; C09J5/02 ; B29C59/14 ; B05D3/14

Abstract:
Apparatus and method for the plasma treatment of surfaces with a first electrode and a second electrode, the apparatus and method comprises an alternating voltage source between the first and second electrodes, and an electrical field forming, at least between the first and second electrodes, an effective area, which is arranged in front of the first electrode and in which the surface to be treated can be positioned, wherein the second electrode is arranged closer to the effective area than the first electrode. The apparatus and method provides at least one process gas channel for at least one stream of process gas with at least one outlet at the first electrode, wherein the at least one outlet points in the direction of the effective area, the at least one stream of process gas impinges on the electrical field, the electrical field converts the at least one stream of process gas into a stream of plasma, and the stream of plasma impinges on the effective area.
Public/Granted literature
- US20160118230A1 APPARATUS FOR THE PLASMA TREATMENT OF SURFACES AND A METHOD FOR TREATING SURFACES WITH PLASMA Public/Granted day:2016-04-28
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