Invention Grant
- Patent Title: Sacrificial shorting straps for superconducting qubits
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Application No.: US15887297Application Date: 2018-02-02
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Publication No.: US10256106B2Publication Date: 2019-04-09
- Inventor: Josephine B. Chang , Douglas T. McClure, III
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/3065 ; H01L39/22 ; H01L39/24 ; H01L39/02

Abstract:
A technique relates to protecting a tunnel junction. A first electrode paddle and a second electrode paddle are on a substrate. The first and second electrode paddles oppose one another. A sacrificial shorting strap is formed on the substrate. The sacrificial shorting strap connects the first electrode paddle and the second electrode paddle; The tunnel junction is formed connecting the first electrode paddle and the second electrode paddle, after forming the sacrificial shorting strap. The substrate is mounted on a portion of a quantum cavity. The portion of the quantum cavity is placed in a vacuum chamber. The sacrificial shorting strap is etched away in the vacuum chamber while the substrate is mounted to the portion of the quantum cavity, such that the sacrificial shorting strap no longer connects the first and second electrode paddles. The tunnel junction has been protected from electrostatic discharge by the sacrificial shorting strap.
Public/Granted literature
- US20180174852A1 SACRIFICIAL SHORTING STRAPS FOR SUPERCONDUCTING QUBITS Public/Granted day:2018-06-21
Information query
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