Invention Grant
- Patent Title: Radio-frequency isolation using front side opening
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Application No.: US15386987Application Date: 2016-12-21
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Publication No.: US10256197B2Publication Date: 2019-04-09
- Inventor: Jerod F. Mason , Dylan Charles Bartle , David Scott Whitefield
- Applicant: SKYWORKS SOLUTIONS, INC.
- Applicant Address: US MA Woburn
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US MA Woburn
- Agency: Chang & Hale LLC
- Main IPC: H04B10/40
- IPC: H04B10/40 ; H01L23/00 ; H04B1/401 ; H01L21/84 ; H01L27/12 ; H01L23/66 ; H01L21/683 ; H01L21/762 ; H01L21/768 ; H01L23/528 ; H01L29/06 ; H01L29/78 ; H04B1/40 ; H01L23/535 ; H01L29/786 ; H01L23/31 ; H01L23/498 ; H01L25/16
Abstract:
A transistor device includes a transistor implemented over a semiconductor substrate, one or more dielectric layers formed over the transistor, and a handle wafer layer disposed on at least a portion of the one or more dielectric layers, the handle wafer layer including a topside trench defined at least in part by sidewall portions of the handle wafer layer.
Public/Granted literature
- US20170104540A1 RADIO-FREQUENCY ISOLATION USING FRONT SIDE OPENING Public/Granted day:2017-04-13
Information query
