Invention Grant
- Patent Title: Method for manufacturing improved NIR CMOS sensors
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Application No.: US16068724Application Date: 2016-12-30
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Publication No.: US10256270B2Publication Date: 2019-04-09
- Inventor: Giovanni Margutti , Andrea Del Monte
- Applicant: LFOUNDRY S.R.L.
- Applicant Address: IT
- Assignee: LFOUNDRY S.R.L.
- Current Assignee: LFOUNDRY S.R.L.
- Current Assignee Address: IT
- Agency: The Belles Group, P.C.
- Priority: IT102016000002587 20160113
- International Application: PCT/EP2016/082948 WO 20161230
- International Announcement: WO2017/121630 WO 20170720
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A method for manufacturing a CMOS image sensor for near infrared detection. The method includes: a) providing a silicon wafer; b) performing a germanium implantation in a portion of a front side of the silicon wafer; c) performing an annealing so as to cause thermal diffusion of implanted germanium species, thereby forming silicon-germanium alloy lattice in a first silicon-germanium region exposed on the front side of the silicon wafer; d) carrying out the steps b) and c) one or more times; and e) forming first photodetector active areas in portions of the first silicon-germanium region downwards extending from the front side of the silicon wafer, wherein said first photodetector active areas are sensitive to both near infrared and visible radiations. The first photodetector active areas are formed also in portions of the silicon wafer extending below said portions of the first silicon-germanium region.
Public/Granted literature
- US20190027532A1 METHOD FOR MANUFACTURING IMPROVED NIR CMOS SENSORS Public/Granted day:2019-01-24
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