Invention Grant
- Patent Title: Vertical gallium nitride power field-effect transistor with a field plate structure
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Application No.: US15053715Application Date: 2016-02-25
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Publication No.: US10256294B2Publication Date: 2019-04-09
- Inventor: Subrahmanyam V. Pilla , Tso-Min Chou
- Applicant: RF Micro Devices, Inc.
- Applicant Address: US NC Greensboro
- Assignee: Qorvo US, Inc.
- Current Assignee: Qorvo US, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/08 ; H01L29/20 ; H01L29/40 ; H01L29/78 ; H01L29/66 ; H01L29/205 ; H01L29/417

Abstract:
The present disclosure relates to a vertical gallium-nitride (GaN) power field-effect transistor (FET) with a field plate structure. The vertical GaN power FET includes a conductive substrate, a drift region, a field plate structure, a channel region with tapered side walls, a gate dielectric region, a gate contact, a drain contact and source contacts. The field plate structure includes a lower layer formed of pi p-type graded AlGaN and a upper layer formed of p-type GaN. The field plate structure utilizes the charge separation at the interface between the lower layer and the upper layer to achieve high breakdown voltage.
Public/Granted literature
- US20160343801A1 VERTICAL GALLIUM NITRIDE POWER FIELD-EFFECT TRANSISTOR WITH A FIELD PLATE STRUCTURE Public/Granted day:2016-11-24
Information query
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