Invention Grant
- Patent Title: Steep-switch field effect transistor with integrated bi-stable resistive system
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Application No.: US15894162Application Date: 2018-02-12
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Publication No.: US10256316B1Publication Date: 2019-04-09
- Inventor: Julien Frougier , Nicolas Loubet , Ruilong Xie , Daniel Chanemougame , Ali Razavieh , Kangguo Cheng
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Garg Law Firm, PLLC
- Agent Rakesh Garg; Grant Johnson
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/43 ; H01L29/78 ; H01L23/525 ; H01L21/3213 ; H01L21/3105 ; H01L49/00 ; H04L29/08

Abstract:
Fabricating a steep-switch transistor includes receiving a semiconductor structure including a substrate, a fin disposed on the substrate, a source/drain disposed on the substrate adjacent to the fin, a gate disposed upon the fin, a cap disposed on the gate, a trench contact formed on and in contact with the source/drain, and a source/drain contact formed on an in contact with the trench contact. A recess is formed in a portion of the source/drain contact using a recess patterning process. A bi-stable resistive system (BRS) material is deposited in the recess in contact with the portion of the source/drain contact. A metallization layer is formed in contact upon the BRS material, a portion of the source/drain contact, the BRS material, and a portion of the metallization layer contact forming a reversible switch.
Information query
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