Invention Grant
- Patent Title: Magnetic sensor and method of fabricating the same
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Application No.: US15204630Application Date: 2016-07-07
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Publication No.: US10256396B2Publication Date: 2019-04-09
- Inventor: Kwan Soo Kim , Dong Joon Kim , Seung Han Ryu , Hee Baeg An , Jong Yeul Jeong , Kyung Soo Kim , Kang Sup Shin
- Applicant: Magnachip Semiconductor, Ltd.
- Applicant Address: KR Cheongju-si
- Assignee: MagnaChip Semiconductor, Ltd.
- Current Assignee: MagnaChip Semiconductor, Ltd.
- Current Assignee Address: KR Cheongju-si
- Agency: NSIP Law
- Priority: KR10-2013-0025230 20130308
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L43/04 ; H01L43/06 ; H01L43/14 ; G01R33/00 ; G01R33/07
Abstract:
Provided are a magnetic sensor and a method of fabricating the same. The magnetic sensor includes: hall elements disposed in a substrate, a protection layer disposed on the substrate, a seed layer disposed on the protection layer, and an integrated magnetic concentrator (IMC) formed on the seed layer, the seed layer and the IMC each having an uneven surface.
Public/Granted literature
- US20160322561A1 MAGNETIC SENSOR AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-11-03
Information query
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