- Patent Title: Thin-film transistor array panel and manufacturing method thereof
-
Application No.: US15114864Application Date: 2016-04-01
-
Publication No.: US10256426B2Publication Date: 2019-04-09
- Inventor: Xiaowen Lv
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONOCS TECHNOLO9GY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONOCS TECHNOLO9GY CO., LTD.
- Current Assignee Address: CN Shenzhen, Guangdong
- Agency: Soroker Agmon Nordman
- Priority: CN201610125243 20160307
- International Application: PCT/CN2016/078373 WO 20160401
- International Announcement: WO2017/152445 WO 20170914
- Main IPC: H01L21/77
- IPC: H01L21/77 ; H01L27/12 ; H01L27/32 ; H01L51/05 ; G02F1/1368 ; H01L29/786

Abstract:
A thin-film transistor array panel and a manufacturing method thereof are disclosed. The thin-film transistor array panel has a polysilicon layer including a first region, a second region and a third region. The second region includes a fourth region, a fifth region and a sixth region. The third region includes a seventh region, an eighth region and ninth region. The sixth, the fourth, the ninth and the seventh regions are doped with first, second, third and fourth ions, respectively. In a thin-film transistor of the thin-film transistor array panel, a gate electrode, a source electrode and a drain electrode thereof correspond to the first, the sixth and the ninth regions, respectively. The device is able to reduce leakage current in the thin-film transistor.
Public/Granted literature
- US20180090703A1 THIN-FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-03-29
Information query
IPC分类: