Invention Grant
- Patent Title: Communication filter using single crystal acoustic resonator devices
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Application No.: US15647098Application Date: 2017-07-11
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Publication No.: US10256786B1Publication Date: 2019-04-09
- Inventor: Shawn R. Gibb , Ramakrishna Vetury , Jeffrey B. Shealy , Mark D. Boomgarden , Michael P. Lewis , Alexander Y. Feldman
- Applicant: Akoustis, Inc.
- Applicant Address: US NC Huntersville
- Assignee: Akoustis, Inc.
- Current Assignee: Akoustis, Inc.
- Current Assignee Address: US NC Huntersville
- Agency: Ogawa P.C.
- Agent Richard T. Ogawa
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/04 ; H03H9/05 ; H03H9/13 ; H01L41/053 ; H03H3/02 ; H01L41/047 ; H01L41/29

Abstract:
A communication system using a single crystal acoustic resonator device. The device includes a piezoelectric substrate with a piezoelectric layer formed overlying a thinned seed substrate. A topside metal electrode is formed overlying the substrate. A topside micro-trench is formed within the piezoelectric layer. A topside metal with a topside metal plug is formed within the topside micro-trench. First and second backside trenches are formed within the seed substrate under the topside metal electrode. A backside metal electrode is formed under the seed substrate, within the first backside trench, and under the topside metal electrode. A backside metal plug is formed under the seed substrate, within the second backside trench, and under the topside micro-trench. The backside metal plug is connected to the topside metal plug and the backside metal electrode. The topside micro-trench, the topside metal plug, the second backside trench, and the backside metal plug form a micro-via.
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