Invention Grant
- Patent Title: Acoustic resonator including extended cavity
-
Application No.: US15476797Application Date: 2017-03-31
-
Publication No.: US10256788B2Publication Date: 2019-04-09
- Inventor: Siamak Fouladi Azarnaminy , David A. Feld , Qiang Zou , Andrew Barfknecht , Mohamed Abd Allah , Jing Wu , Zongliang Cao , Guiti Zolfagharkhani
- Applicant: Avago Technologies General IP (Singapore) Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Avago Technologies International Sales Pte. Limited
- Current Assignee: Avago Technologies International Sales Pte. Limited
- Current Assignee Address: SG Singapore
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/54 ; H01L41/047 ; H01L41/08

Abstract:
A BAW resonator includes a nonlinear substrate defining a cavity, and an acoustic stack over the cavity, including a bottom electrode, a piezoelectric layer, and a top electrode, where an active region of the acoustic stack includes overlapping portions of the cavity, the bottom electrode, the piezoelectric layer and the top electrode. The BAW resonator further includes a connecting strip extending from a portion of the top electrode for providing electrical excitation of the acoustic stack, where an E-field generated in the BAW resonator begins at the top electrode and terminates at the bottom electrode in response to the electrical excitation. The cavity includes an inner portion in the active region and an extended portion extending from an outer perimeter of the active region underneath the connecting strip. A length of the extended portion are sufficient to substantially prevent portions of the E-field from passing through the substrate.
Public/Granted literature
- US20180287584A1 ACOUSTIC RESONATOR INCLUDING EXTENDED CAVITY Public/Granted day:2018-10-04
Information query
IPC分类: