Invention Grant
- Patent Title: MEMS and/or NEMS dynamic pressure sensor with improved performances and microphone comprising such a sensor
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Application No.: US15072495Application Date: 2016-03-17
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Publication No.: US10257615B2Publication Date: 2019-04-09
- Inventor: Loic Joet
- Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1552340 20150320
- Main IPC: G01L9/08
- IPC: G01L9/08 ; H04R19/04 ; H04R17/02 ; H04R7/04 ; H04R7/24 ; H04R19/00

Abstract:
Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.
Public/Granted literature
Information query