Reactor and process for preparing granular polysilicon
Abstract:
A reactor for preparing granular polysilicon by deposition of polycrystalline silicon on silicon seed particles has a reaction vessel, an inner reactor tube for a fluidized bed comprising granular polysilicon and a reactor bottom within the reactor vessel, a heating device for heating the fluidized bed in the inner reactor tube, at least one bottom gas nozzle for introduction of fluidizing gas and at least one reaction gas nozzle for introduction of reaction gas, a feed device to introduce silicon seed particles, an offtake line for granular polysilicon, and a device for discharging reactor offgas from the reactor vessel, and has a cylindrical component which has openings on its cylindrical surface, with at least 5% and not more than 95% of the cylindrical surface being open located between the inner reactor tube and the heating device.
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