Invention Grant
- Patent Title: Method for manufacturing nitride crystal substrate and substrate for crystal growth
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Application No.: US15398319Application Date: 2017-01-04
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Publication No.: US10260165B2Publication Date: 2019-04-16
- Inventor: Yusuke Mori , Masashi Yoshimura , Mamoru Imade , Masayuki Imanishi , Masatomo Shibata , Takehiro Yoshida
- Applicant: OSAKA UNIVERSITY , SCIOCS COMPANY LIMITED , SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Suita-shi, Osaka JP Hitachi-shi JP Tokyo
- Assignee: Osaka University,Sciocs Company Limited,Sumitomo Chemical Company, Limited
- Current Assignee: Osaka University,Sciocs Company Limited,Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Suita-shi, Osaka JP Hitachi-shi JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2016-000354 20160105
- Main IPC: C30B25/18
- IPC: C30B25/18 ; C30B19/12 ; C30B19/02 ; C30B29/40 ; H01L21/02

Abstract:
There is provided a method for manufacturing a nitride crystal substrate, including: arranging a plurality of seed crystal substrates made of a nitride crystal in a planar appearance, so that their main surfaces are parallel to each other and their lateral surfaces are in contact with each other; growing a first crystal film using a vapor-phase growth method on a surface of the plurality of seed crystal substrates arranged in the planar appearance, and preparing a combined substrate formed by combining the adjacent seed crystal substrates each other by the first crystal film; growing a second crystal film using a liquid-phase growth method on a main surface of the combined substrate so as to be embedded in a groove that exists at a combined part of the seed crystal substrates, and preparing a substrate for crystal growth having a smoothened main surface; and growing a third crystal film using the vapor-phase growth method, on the smoothed main surface of the substrate for crystal growth.
Public/Granted literature
- US20170191186A1 METHOD FOR MANUFACTURING NITRIDE CRYSTAL SUBSTRATE AND SUBSTRATE FOR CRYSTAL GROWTH Public/Granted day:2017-07-06
Information query
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