Invention Grant
- Patent Title: Vacuum valve and vacuum pressure control system using the same
-
Application No.: US15597921Application Date: 2017-05-17
-
Publication No.: US10260656B2Publication Date: 2019-04-16
- Inventor: Minoru Ito , Masayuki Watanabe , Seiji Hashiguchi
- Applicant: CKD CORPORATION
- Applicant Address: JP Komaki-shi
- Assignee: CKD CORPORATION
- Current Assignee: CKD CORPORATION
- Current Assignee Address: JP Komaki-shi
- Agency: Oliff PLC
- Priority: JP2016-110969 20160602
- Main IPC: F16K51/02
- IPC: F16K51/02 ; F16J1/00 ; F16K1/46 ; G05D16/20
Abstract:
A vacuum valve placed between a vacuum vessel and a vacuum pump to adjust a valve opening degree using an operating fluid includes a packing mounted in a recessed groove of a piston. The packing is provided with a contact portion on a radially inner side and a contact portion on a radially outer side, and a slide-contact portion contacting with an inner peripheral surface of a cylinder. A portion between the contact portion and the slide-contact portion has a thin thickness.
Public/Granted literature
- US20170351275A1 VACUUM VALVE AND VACUUM PRESSURE CONTROL SYSTEM USING THE SAME Public/Granted day:2017-12-07
Information query
