Invention Grant
- Patent Title: Confocal displacement sensor
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Application No.: US15989215Application Date: 2018-05-25
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Publication No.: US10260859B2Publication Date: 2019-04-16
- Inventor: Shoma Kuga
- Applicant: Keyence Corporation
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: JP2015-254804 20151225
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01D5/26 ; G01B11/00

Abstract:
To provide a confocal displacement sensor capable of reducing a measurement error. Light having a plurality of wavelengths is emitted by a light processing section 120. A chromatic aberration along an optical axis direction is caused by a lens unit 220 in the light emitted by the light projecting section 120. The light having the chromatic aberration converged and irradiated on a measurement object S by the lens unit 220. In the light irradiated on the measurement object S by the lens unit 220, light having a wavelength reflected while focusing on the surface of the measurement object S passes through a plurality of pinholes. Displacement of the measurement object S is calculated by an arithmetic processing section 150 on the basis of signal intensity for each wavelength of an average signal corresponding to an average of intensities for each wavelength concerning a plurality of lights passed through the plurality of pinholes.
Public/Granted literature
- US20180274902A1 Confocal Displacement Sensor Public/Granted day:2018-09-27
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