Invention Grant
- Patent Title: Measurement apparatus and method that measure shape of surface while canceling cyclical errors to zero by summing of cyclic errors having different phases
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Application No.: US14823209Application Date: 2015-08-11
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Publication No.: US10260867B2Publication Date: 2019-04-16
- Inventor: Takahiro Yamamoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-167960 20140820; JP2015-105818 20150525
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/24 ; G01B5/004 ; G01B11/00

Abstract:
The present invention provides a measurement apparatus for measuring a shape of a test surface, comprising an optical system configured to irradiate a measurement point on the test surface and a reference surface with light, and cause test light and reference light reflected to interfere with each other, a detector configured to detect an optical path length difference between the test light and the reference light by using interfering light and a processor configured to determine a position of the measurement point based on a plurality of detection results by the detector, wherein a detection result includes an error which cyclically changes, and the plurality of detection results include n detection results obtained in n states in which optical path lengths of the test light are different from each other by 1/n (n≥2) of a cycle of the error.
Public/Granted literature
- US20160054117A1 MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2016-02-25
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